JPS621229Y2 - - Google Patents
Info
- Publication number
- JPS621229Y2 JPS621229Y2 JP12121682U JP12121682U JPS621229Y2 JP S621229 Y2 JPS621229 Y2 JP S621229Y2 JP 12121682 U JP12121682 U JP 12121682U JP 12121682 U JP12121682 U JP 12121682U JP S621229 Y2 JPS621229 Y2 JP S621229Y2
- Authority
- JP
- Japan
- Prior art keywords
- target
- plated
- shutter
- vacuum container
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004544 sputter deposition Methods 0.000 claims description 21
- 239000010409 thin film Substances 0.000 claims description 13
- 239000011261 inert gas Substances 0.000 claims description 7
- 239000000470 constituent Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000428 dust Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12121682U JPS5924759U (ja) | 1982-08-10 | 1982-08-10 | スパツタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12121682U JPS5924759U (ja) | 1982-08-10 | 1982-08-10 | スパツタリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5924759U JPS5924759U (ja) | 1984-02-16 |
| JPS621229Y2 true JPS621229Y2 (en]) | 1987-01-13 |
Family
ID=30277520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12121682U Granted JPS5924759U (ja) | 1982-08-10 | 1982-08-10 | スパツタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5924759U (en]) |
-
1982
- 1982-08-10 JP JP12121682U patent/JPS5924759U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5924759U (ja) | 1984-02-16 |
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